Chip device and a particle analyzing apparatus

ABSTRACT

A chip device is provided. The chip device includes a flow channel configured to pass a fluid therein; an ejection portion including an opening toward an end face of a substrate layer including at least one layer, the ejection portion is configured to provide the fluid from the flow channel, and a cavity provided between the opening of the ejection portion and the end face of the substrate layer, wherein at least a portion of the cavity is provided at the end face of the substrate layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.14/234,469, filed Jan. 23, 2014, which is a national stage ofInternational Application No. PCT/JP2012/004215, filed Jun. 29, 2012,which claims priority to Japanese Application No. 2011-169726 filed Aug.3, 2011, the disclosures of which are hereby incorporated herein byreference.

BACKGROUND

The present disclosure relates to microchips. More particularly,embodiments of the present disclosure relate to a microchip used inanalyzing particles such as cells or the like.

Recently developed microchips are provided with regions or channelswhich are formed to perform a chemical or biological analysis on asubstrate made of silicon, glass, or the like by employingmicromachining techniques used in the semiconductor industry. Analysissystems using such microchips are called a micro-total-analysis system(micro-TAS), lab-on-a-chip, biochip or the like. These analysis systemsare paid attention to as technology capable of enhancing the speed,efficiency, or integration of analysis, and further capable of providinga compact analyzing apparatus.

The micro-TAS is used in a case where an analysis is performed withsmall amount of samples or a case where microchips are designed fordisposable use, thus the micro-TAS is particularly expected to beapplied to a biological analysis which deals with valuable and verysmall amount of samples or a large number of specimens. As anapplication example of the micro-TAS, electrochemical detectors andcompact-sized electrochemical sensors are presented. The electrochemicaldetectors are used in liquid chromatography, and the compact-sizedelectrochemical sensors are used in clinical or medical practice.

As another application example of the micro-TAS, there is a technologyin which particles such as cells, micro-beads, and so on are analyzed ina channel provided on a microchip. In this technology, thecharacteristics of particles are analyzed in an optical, electrical ormagnetic manner. In this particle analyzing technology, when there is apopulation (group) which is determined that a predetermined condition issatisfied according to the analyzed results, the population is separatedand collected from among particles.

Patent Literature 1, for example, discloses “a microchip including aflow path through which liquid containing micro particle flows, anorifice through which the liquid flowing through the flow path isdischarged to a space outside the chip, and a light-irradiated portiondisposed in a predetermined location of the flow path for detecting anoptical property of the micro particle”. The microchip disclosed inPatent Literature 1 is used to sort the micro particle determined tohave a predetermined optical property by controlling movement directionsof a liquid drop containing the micro particle discharged from theorifice.

CITATION LIST Patent Literature

-   [PTL 1] Japanese Patent Application Laid-open No. 2010-190680

SUMMARY

In the particle analyzing microchip such as described in PatentLiterature 1, in order to accurately control a flow direction ofdroplets ejected from an orifice and to properly separate and sort theparticles, it will be necessary to stably eject the droplets of regularsize and shape from the orifice and to maintain a steady ejecting path.

In light of the foregoing, it is desirable to provide a microchipcapable of steady ejecting droplets of regular size and shape from anorifice and maintaining a steady ejecting path in a cost-effective andeasy manner without using expensive materials or undergoing complicatedmolding processes.

SOLUTION TO PROBLEM

According to an embodiment of the present disclosure, there is provideda microchip including a flow channel, an ejection portion, and a cutoutportion. The flow channel is configured to convey a fluid therein. Theejection portion includes an opening directed toward an end face of asubstrate layer, and the ejection portion is configured to eject thefluid flowing through the flow channel to outside. The substrate layeris laminated to each other. The cutout portion is formed between theopening of the ejection portion and the end face of the substrate layer.The cutout portion has a larger diameter than that of the opening. Themicrochip according to the embodiment may further include a connectionportion, configured to have a straight line shape, for connecting theflow channel to the ejection portion.

In the microchip according to the embodiment, the cutout portion isprovided between the opening of the ejection portion and the end face ofthe substrate layer, and the ejection portion is provided at a positionrecessed inwardly by a predetermined distance from the end face of thesubstrate layer susceptible to molding defect due to injection molding.The opening of the ejection portion therefore can be prevented frombeing irregular in shape, thereby forming the ejection portion having adesired shape.

In the microchip of the embodiment, the ejection portion is provided ata position recessed inwardly by a predetermined distance from the endface of the substrate layer susceptible to deformation due tothermocompression bonding. The shape of the ejection portion and theshape of the connection portion arranged to connect the flow channelwith the ejection portion thus can be prevented from being deformed.Also, the ejection portion and flow channel having desired shapes can beformed.

In the microchip of the embodiment, the cutout portion preferably has awidth of 0.2 millimeters or more in corresponding with a distancebetween the opening and the end face.

The cutout portion having a width of 0.2 millimeters or more allowsmolding defect caused due to injection molding or deformation caused dueto thermocompression bonding to be prevented certainly.

The microchip according to the embodiment of the present disclosure ispreferably used in analyzing particles. There is also provided aparticle analyzing apparatus having the microchip mounted thereon.

As used herein, the term “particle(s)” should be broadly construed toinclude bioparticles such as cell, microorganism, and liposome as wellas synthetic particles such as latex particles, gel particles, andindustrial particles. Examples of the bioparticles include chromosome,liposome, mitochondria, and organelle (cell compartment) constitutingvarious cells. Examples of the cells include animal cells (e.g., bloodcorpuscle cells) and plant cells. Examples of the microorganisms includebacteria such as colon bacillus, viruses such as tobacco mosaic virus,and fungi such as yeast. Examples of the microscopic bioparticlesinclude microscopic biopolymers such as nucleic acid, proteins, andcomplexes thereof. The industrial particles may be, for example, organicor inorganic polymer materials, metals or the like. The organic polymermaterials include polystyrene, stylene-vinyl benzene, and polymethylmethacrylate. Examples of the inorganic polymer materials include glass,silica, and magnetic materials. Examples of the metals include goldcolloid and alumina. The shapes of these particles are typicallyspherical, but may be non-spherical. In addition, embodiments of thepresent disclosure are not particularly limited to factors such asparticle size or mass.

ADVANTAGEOUS EFFECTS OF INVENTION

According to the embodiments of the present disclosure, there isprovided a microchip capable of stably ejecting droplets of regular sizeand shape from an orifice and maintaining a steady ejecting path in acost-effective and easy manner without using expensive materials orundergoing complicated molding processes.

BRIEF DESCRIPTION OF THE FIGURES

FIGS. 1A and 1B are schematic diagrams illustrating a configuration of aparticle analyzing apparatus A according to an embodiment of the presentdisclosure;

FIG. 2 is a schematic diagram illustrating a configuration of theparticle analyzing apparatus A according to an embodiment of the presentdisclosure;

FIG. 3 is a schematic diagram illustrating a configuration of theparticle analyzing apparatus A according to an embodiment of the presentdisclosure;

FIG. 4 is a schematic diagram illustrating a configuration of theparticle analyzing apparatus A according to an embodiment of the presentdisclosure;

FIGS. 5A and 5B are schematic diagrams illustrating a configuration of amicrochip 1 according to an embodiment of the present disclosure;

FIGS. 6A through 6C are schematic diagrams illustrating a configurationof an orifice 12 according to an embodiment of the present disclosure;

FIG. 7 is a schematic diagram illustrating a droplet D ejected from theorifice 12 according to an embodiment of the present disclosure;

FIG. 8 is a schematic diagram illustrating a particle sorting operationof the particle analyzing apparatus A according to an embodiment of thepresent disclosure;

FIGS. 9A and 9B are photographs showing typical examples of the shape ofdroplets ejected from the microchip 1 (A) according to the embodiment ofthe present disclosure and a typical example of the shape of dropletsejected from a microchip in the related art shown in FIG. 10 (B); and

FIGS. 10A through 10C are schematic diagrams illustrating aconfiguration of an orifice of the microchip in the related art.

DETAILED DESCRIPTION

Hereinafter, preferred embodiments of the present disclosure will bedescribed in detail with reference to the appended drawings. Note that,in this specification and the appended drawings, structural elementsthat have substantially the same function and structure are denoted withthe same reference numerals, and repeated explanation of thesestructural elements is omitted.

The description will be given in the following order.

-   1. Particle Analyzing Apparatus-   2. Microchip-   3. Operation of Particle Analyzing apparatus

Particle Analyzing Apparatus

FIGS. 1 to 4 are schematic diagrams illustrating configurations of aparticle analyzing apparatus according to an embodiment of the presentdisclosure. In these figures, the particle analyzing apparatus Aincludes a particle sorting region protected by a cover A₂ of a mainbody A₁. This particle sorting region is further protected by a sortingcover A₃. The particle sorting region is configured to include amicrochip 1 which is inserted and mounted into a top opening of thesorting cover A₃. In FIG. 2, a block-shaped arrow indicates an insertiondirection along which a microchip module is inserted into the sortingcover A₃. The microchip module includes the microchip 1 as a constituentelement thereof. The illustration of the sorting cover A₃ is omitted inFIG. 3 for the convenience of explanation. Further, only the microchip 1of the microchip module inserted into the sorting cover A₃ is shown inFIG. 3, and other portions of the microchip module are omitted.

The particle sorting region includes the microchip 1, an opticaldetection unit 3, a pair of electrodes 4, 4 and three collection units(containers 51, 52, and 53). The optical detection unit 3 irradiates alight onto a predetermined area of the microchip 1. The opticaldetection unit 3 and the pair of electrodes 4, 4 are provided in themain body A₁. Each of the containers 51, 52 and 53 is detachably mountedto the main body A₁.

A configuration of the particle sorting region will be described indetail below with reference to FIG. 4. FIG. 4 illustrates the microchip1, the optical detection unit 3, the pair of electrodes 4, 4, thecontainer 51 to 53, and so on. As shown in FIG. 4, a vibrating device 2is provided on the microchip 1. Electrodes 6, 6 are connected to theground.

The microchip 1 includes a sample flow channel 11. A stream of fluidcontaining the particle to be sorted flows through the sample flowchannel 11 (the fluid is referred to hereinafter as a “sample fluid”).The optical detection unit 3 irradiates a light onto a predeterminedarea of the sample flow channel 11 (the light is referred to hereinafteras a “measuring light”). The optical detection unit 3 also detects alight emitted from the particles flowing through the sample flow channel11 (the light is referred to hereinafter as a “light to be measured”).The area which is irradiated with the measuring light by the opticaldetection unit 3 in the sample flow channel 11 is hereinafter referredto as a “light irradiation area”.

The optical detection unit 3 may be structurally similar to that used ina particle analyzing apparatus in the related art. More specifically,the optical detection unit 3 includes a laser light source, anirradiation system, and a detection system. The irradiation systemincludes a condensing lens or diachronic mirror configured to condenseand irradiate a laser light onto particles, and a band pass filter. Thedetection system is arranged to detect the light to be measured which isemitted from the particles in response to the irradiation of the laserlight. The detection system is configured to include a photo multipliertube (PMT), or an area image-capturing device such as a charge coupleddevice (CCD) or complementary metal-oxide semiconductor (CMOS) device.In the FIG. 4, only the condensing lens is illustrated as the opticaldetection unit 3. In FIG. 4, the irradiation and detection systems arearranged so that they have a common flow channel, but the irradiationand detection systems may be arranged to have the respective flowchannels.

The light to be measured is detected by the detection system of theoptical detection unit 3 and is emitted from the particles in responseto the irradiation of the laser light. Examples of the light to bemeasured may include a forward scatter, a side scatter, a scatteredlight such as Rayleigh scattering or Mie scattering, or fluorescence.The light to be measured is converted into electrical signals. Theoptical characteristics of the particles are detected on the basis ofthe electrical signal.

The sample fluid is passed through the light irradiation area and thenis ejected from an orifice 12 to the outside of the microchip. Theorifice 12 (also referred to as an ejection portion) is provided at oneend of the sample flow channel 11. In this case,

The microchip 1 is vibrated by the vibrating device 2 such as apiezo-electric element and thus the sample fluid can be broken intoindividual droplets and be ejected to the outside of the microchip. Thatis, the droplet D is ejected to the outside of the microchip.

The droplet D may contain respective particles to be sorted. The pair ofelectrodes 4, 4 are arranged along the flow direction of dropletsejected to the outside of the microchip. The pair of electrodes 4, 4 arearranged to be faced each other so that the droplets may be passedbetween the electrodes. An electric charge applying device (not shown)applies electric charge to the ejected droplet. The flow directions ofdroplets are controlled by an electrostatic repulsive force (or anelectrostatic attractive force) acting between the pair of electrode 4,4 and the droplet which is charged with any electric charge. The pair ofelectrode 4, 4 allows the droplets to be diverted and guided intorespective corresponding one of the containers 51, 52, and 53.

The flow directions of droplets containing individual particles arecontrolled by the pair of electrode 4, 4 based on the opticalcharacteristics of individual particles detected by the opticaldetection unit 3. Thus, the particle analyzing apparatus A can collectand sort the particles with desired characteristics into respectivecorresponding one of the containers 51 to 53.

In the particle analyzing apparatus A, electric or magnetic detectiondevice may be used instead of the optical detection unit 3. When thecharacteristics of particles are intended to be detected in anelectrical or magnetic manner, microelectrodes are arranged to be facedeach other and the sample flow channel 11 is placed between themicroelectrodes, thereby measuring resistance, capacitance, inductances,impedance, variations in electric field between the electrodes,magnetization, variations in magnetic field, variations in magneticfield, and so on. In this case, the particles are sorted on the basis ofelectrical or magnetic characteristics of the particles.

2. Microchip

FIGS. 5A and 5B are schematic diagrams illustrating a configuration ofthe microchip 1. FIG. 5A shows a schematic top view and FIG. 5B shows aschematic sectional view taken along the line P-P of FIG. 5A. FIGS. 6A,6B and 6C are schematic diagrams illustrating a configuration of theorifice 12 of the microchip 1. FIG. 6A shows a schematic top view, FIG.6B shows a schematic sectional view taken along the line P-P of FIG. 5A,and FIG. 6C shows a front view.

In the microchip 1, substrate layers 1 a, 1 b are bonded to each otherso as to form the sample flow channel 11. The sample flow channel 11 canbe formed by injection molding of a thermoplastic resin using a mold.The sample flow channel 11 may be formed at either one or both of thesubstrate layers 1 a, 1 b. In the case where the sample flow channel 11is formed at both of the substrate layers 1 a, 1 b, respective parts ofthe sample flow channel are partially formed on both layers.

As a material used in forming a typical microchip, the thermoplasticresin can employ a known plastic material such as polycarbonate,polymethyl methacrylate (PMMA), cyclic polyolefin, polyethylene,polystyrene, polypropylene, and polydimethyl siloxane (PDMS).

The injection molding may be implemented in the usual way. For example,when injection molding process is done by polyolefin (ZEONEX 1060Rmanufactured by Zeon Corporation) using the injection molding machine(SE75DU manufactured by Sumitomo Heavy Industries, Ltd.), the typicalmolding process is performed under conditions involving a resintemperature of 270 deg C., a mold temperature of 80 deg C., and a moldclamping force of 500 kilo-Newton (kN).

The substrate layers 1 a, 1 b forming the sample flow channel 11 arebonded to each other by thermocompression bonding using well knownprocesses. For example, when the substrate layers made of polyolefin arebonded together by thermocompression bonding using the nano-imprintmachine (Eitre6/8 manufactured by Canon Inc.), the typical compressionbonding process is performed by pressing the substrate layers forseveral minutes under conditions involving a bonding temperature of 95deg C. and a pressing force of 10 kilo-Newton.

The sample fluid flowing out from a sample fluid inlet 13 joins thesheath fluid flowing out from a sheath fluid inlet 14. The joined streampasses through the sample flow channel 11. More specifically, the sheathfluid flowing out from the sheath fluid inlet 14 branches into twodirections and then joins the sample fluid flowing out from the samplefluid inlet 13 at a joining point, so that the sample fluid may besandwiched between the two directional flows of the sheath fluid. Thus,the sample fluid is placed midway between the flows of the sheath fluid,thereby forming three-dimensional laminar flow.

When there are some clogging materials or bubbles within the sample flowchannel 11, a suction channel 15 removes any clogging material orbubbles by causing the stream in the sample flow channel 11 to betemporarily flowed in the reverse direction. The reversing of the flowdirection is implemented by a negative pressure applied to the thesample flow channel 11. A suction outlet 151 is formed at one end of thesuction channel 15. The suction outlet 151 is connected to a negativepressure source such as a vacuum pump. The other end of the suctionchannel 15 is communicated with the sample flow channel 11 through acommunicating port 152.

The three-dimensional laminar flow is passed through a tapered portion161 (see FIG. 5) or 162 (see FIG. 6) which is gradually thinned downalong a fluid flowing direction, and then the three-dimensional laminarflow is ejected from the orifice 12 provided at one end of the sampleflow channel. The tapered portion is formed such that the cross sectionprofile of the tapered portion perpendicular to the fluid flowingdirection is narrowed down in a gradual or stepwise manner according tothe fluid flowing direction. As shown in FIG. 7, the droplet D isejected from the orifice 12 to the outside of the microchip. In FIG. 7,the droplet D is ejected from the orifice 12 in an ejection direction F.

A straight portion 17 connects the sample flow channel 11 to the orifice12 and is formed in a straight line shape. The straight portion 17allows the droplet D to be ejected straight from the orifice 12 in thedirection F indicated by an arrow. The straight portion 17 has a length(denoted as “k” in FIG. 6B) in a range from 100 micrometers to 500micrometers when the orifice 12 has an opening diameter (denoted as “l”in FIG. 6C), for example, in a range from 30 micrometers to 250micrometers. If the straight portion 17 has a length of 100 micrometers,then the ejection direction of the droplet D may be not constant. Inthis case, it will be difficult to precisely control the ejectiondirection of the droplet being ejected to the outside of the microchip.

The orifice 12 is opened toward the end face of the substrate layers 1a, 1 b. A cutout portion 121 is provided between the opening of theorifice 12 and the end face of the substrate layers. The cutout portion121 is formed by cutting out the substrate layers 1 a, 1 b between theopening of the orifice 12 and the end face of the substrate layers sothat a diameter L of the cutout portion 121 may be larger than theopening diameter l of the orifice 12 (see FIG. 6C). The diameter L ofthe cutout portion 121 is preferably more than two times larger than theopening diameter l of the orifice 12 so that the flow of the dropletsejected from the orifice 12 may be prevented from being obstructed.However, if the diameter L of the cutout portion 121 is too large, thenuniformity of a temperature or pressure distribution becomes worse, orgas is gathered in the cutout portion 121, and this becomes the cause ofshape irregularity of the orifice 12. Therefore, the cutout portion 121preferably has the diameter L in a range from 400 micrometers to about 2millimeters, when the orifice 12 typically has the opening diameter l ofabout 200 micrometers.

In this embodiment, the opening of the orifice 12 has a circular shapeand the cutout portion 121 is formed by cutting the substrate layers 1a, 1 b in an octagonal prism shape. However, the opening of the orifice12 is not limited to a circular shape, and may be oval, square,rectangular, or polygonal. The opening of the orifice 12 preferably hasa symmetric shape so as to achieve symmetries of thermal conduction andpressure loading when the substrate layers 1 a, 1 b are bonded throughthermocompression. The cutout portion 121 is not limited to an octagonalprism shape, and may be any shape as long as a space communicating withthe opening of the orifice 12 is formed and the shape does not inhibitthe flow of the droplet ejected from the orifice 12. The cutout portion121 is preferably placed coaxial with the orifice 12, but the embodimentis not limited to this. If the thickness of the microchip 1 is thin,then the cutout portion 121 may be formed by cutting off all the endface of the substrate layers 1 a, 1 b in the thickness direction.

It is generally known that the molding defect called as “burr” or“undercut” are probably occurred at a portion which is contact with themold of the thermoplastic resin when the substrate layer is fabricatedby injection molding. In particular, the gas generated at the time ofmolding will cause any portions which will be the end face of thesubstrate layer and its surroundings to be significantly deformed. Forthis reason, if the opening of the orifice is formed at the end face ofthe substrate layer, then the molding defect makes it easier to causethe orifice to become more irregular in shape.

In the microchip 1 of the embodiment, the cutout portion 121 is providedbetween the opening of the orifice 12 and the end face of the substratelayer, and the orifice 12 is provided at a position recessed inwardly bya predetermined distance from the end face of the substrate layer.Therefore, even though molding defect is occurred at the end face of thesubstrate layer and its surroundings, such molding defect does not havean influence on the shape of the orifice 12. As a result, the opening ofthe orifice 12 can be accurately molded into a desired shape and thedroplet D of regular size and shape can be ejected from the orifice 12.

In order to be completely free from the influence of molding defectoccurred at the end face of the substrate layer and its surroundings, awidth (denoted as “w” in FIG. 6B) of the cutout portion may be set tocorrespond to the distance from the opening of the orifice 12 to the endface of the substrate layer. As an example, when a width (denoted as “W”in FIG. 5) of the microchip 1 in the direction from the orifice 12 tothe end face of the substrate layer is 75 millimeters (the microchipsize: 75 millimeters, 25 millimeters and 2 millimeters in width, length,and thickness, respectively), the width of the cutout portion ispreferably 0.2 millimeters or more. The “burr” or gas occurred whenperforming an injection molding process depends on the types orconditions of the thermoplastic resin, and thus the width w of thecutout portion 121 is preferably set to be changed over a wide range andto be optimized, depending on the types or conditions of thethermoplastic resin.

It has been known that the end face of the substrate layer and itssurrounding edges are likely to be susceptible to deformation due tothermal contraction as compared to a middle portion of the substratelayer, when a thermocompression bonding process is performed on thesubstrate layer. Thus, when the opening of the orifice or a flow channelconnected thereto is provided at the end face of the substrate layer andits vicinities, the shape of the molded orifice or flow channel islikely to be deformed due to the thermal contraction.

In the microchip 1 of the embodiment, the cutout portion 121 is providedbetween the opening of the orifice 12 and the end face of the substratelayer, and the orifice 12 is provided at a position recessed inwardly bya predetermined distance from the end face of the substrate layer.Therefore, when a thermocompression bonding process is performed on thesubstrate layer, the shape of the orifice or flow channel connectedthereto will not be deformed. As a result, in the microchip 1, theshapes of the orifice 12 and straight portion 17 can be maintained inthe desired shape and the droplet D of regular size and shape can beejected straight from the orifice 12.

For comparison, an orifice configuration of a microchip 9 in the relatedart will be described with reference to FIG. 10. The microchip 9 in therelated art does not include any mechanism that may be corresponded tothe cutout portion 121 of the present embodiment. For reference, FIG. 9shows the shape of droplets ejected from the microchip 1 according tothe embodiment of the present disclosure and the shape of dropletsejected from the microchip 9 in the related art. FIG. 9A shows a typicalexample of shapes of droplets ejected from the microchip 1 and FIG. 9Bshows a typical example of shapes of droplets ejected from the microchip9.

The microchip according to the embodiment of the present disclosureincludes the cutout portion allowing the shape irregularity ordeformation of the orifice and flow channel caused due to injectionmolding and thermocompression bonding in the substrate layer to beprevented. According to the microchip of the embodiment, the droplets ofregular size and shape can be stably ejected from the uniform shapedorifice in a steady ejecting path.

In the microchip according to the embodiment of the present disclosure,the orifice and flow channel having a uniform shape can be formed byinjection molding and thermocompression bonding processes usingthermoplastic resin without performing the polishing process onexpensive quartz and ceramic such as alumina and zirconia, therebysaving the cost and increasing the productivity. Furthermore, Accordingto the microchip of the embodiment of the present disclosure, theorifice is not provided at the distal end of the microchip, and thusbreakage of the orifice due to an accidental contact probably occurredduring the manufacturing process is unlikely to happen, therebyincreasing the productivity.

3. Operation of Particle Analyzing Apparatus

An operation of the particle analyzing apparatus A will be describedwith reference to FIG. 8.

The joined sample and sheath fluids, which are passed through the lightirradiation area of the sample flow channel 11, are ejected from theorifice 12 to the outside of the microchip 1. In the light irradiationarea, the optical detection unit detects the optical characteristics ofthe particles and simultaneously detects the fluid flowing speed (flowrate) of the particles and the interval between the particles. Theoptical characteristics, flow rate, interval and the like of theparticles detected by the optical detection unit are converted intorespective electrical signals. The electrical signals are outputted to acontroller (not shown) configured to control the entire apparatus. Thecontroller controls a vibration frequency of the vibrating device 2 (seeFIG. 4) based on the electrical signals, and the controller vibrates themicrochip 1 in such a way that the particle P is suspended in thedroplet D one particle at a time.

In addition, the controller causes the polarity of electric chargeapplied to each of the sheath and sample fluids flowing through thesample flow channel 11 to be changed in synchronization with thevibration frequency of the vibrating device 2. Thus, individual dropletsformed in the orifice 12 can be electrically charged by the controllerand will carry a positive or negative charge.

The optical characteristics of the particle detected by the opticaldetection unit are converted into the electrical signal. The electricalsignal is outputted to the controller. The controller determines whichelectric charge will be applied to the droplet based on the electricalsignal, in accordance with the optical characteristics of the particlecontained in each of the droplets. More specifically, when the dropletsare electrically charged by the controller, the droplet containing theparticle to be sorted with desired characteristics may be positivelycharged, and the droplet which is not containing the particle to besorted may be negatively charged.

In this case, in order to stabilize the electrically charged state ofthe droplet D, in the particle analyzing apparatus A, the groundelectrodes 6, 6 are disposed in the vicinity of the orifice 12 along theflow direction of the droplet being ejected to the outside of themicrochip. The ground electrodes 6, 6 are arranged to be faced eachother and to allow the droplets to be flowed between the electrodes. Theground electrodes 6, 6 are disposed between the orifice 12 and a pair ofelectrodes 41, 42. The pair of electrodes 41, 42 controls the flowdirection of the droplets.

The flow direction of the charged droplet D ejected from the orifice 12is controlled by electrostatic force acting between the electrodes 41and 42. In this case, the stable application of the electric charge tothe droplet is necessary in order to accurately control the flowdirection of the droplet. At this time, a very high voltage is appliedbetween the pair of electrodes 41 and 42, and thus the electricallycharged state of the droplet D is likely to become unstable. To overcomethis, in the particle analyzing apparatus A, the ground electrodes 6, 6are disposed between the orifice 12 and the pair of electrode 41, 42,thereby eliminating the influence of the high potential applied betweenthe pair of electrode 41, 42.

Controlling the flow direction of the droplet D ejected from the orifice12, for example, is carried out as follows. In the previous describedcase where the droplet containing the particle to be sorted may bepositively charged and the droplet not containing the particle to besorted may be negatively charged, when the electrode 41 is positivelycharged and the electrode 42 is negatively charged, the dropletcontaining the particle to be sorted can be deflected and sorted intothe container 53. More specifically, when the droplet containing theparticle to be sorted is positively charged, the flow of the positivelycharged droplet is deflected into a direction indicated by an arrow f3by the electrostatic repulsive force acting between the electrode 41 andthe droplet and by the electrostatic attractive force acting between theelectrode 42 and the droplet. The deflected droplet then moves towardthe container 53. On the other hand, when the droplet not containing theparticle to be sorted is negatively charged, the flow of the negativelycharged droplet is deflected into a direction indicated by an arrow f2,and then the droplet moves toward the container 52.

When the droplet containing the particle to be sorted remains uncharged,the droplet not containing the particle to be sorted is positively ornegatively charged, and each of the electrodes 41, 42 are eitherpositively or negatively charged, then the droplet containing theparticle to be sorted can be deflected and sorted into the container 51.The application of the electric charge to the droplet D and the controlof the droplet flowing direction by the electrodes 41, 42 can beperformed using various kinds of combinations in a similar way to theflow cytometry in the related art. It is noted that two or morecontainers for receiving the droplets D may be provided and the numberof containers is not limited to three. In addition, the container may beconfigured to work as an ejection channel for ejecting the collecteddroplets without accommodating the collected droplets. When the particlenot to be sorted is collected, the particle may be discarded.

As described above, according to the microchip 1, the droplet D ofregular size and shape can be stably ejected from the uniform shapedorifice 12 in a steady ejecting path. Thus, according to the microchip1, the flow direction of the droplet D can be precisely controlled andthe particles with desired characteristics can be correctly sorted.

The description has been given with respect to the case where positiveor negative electric charge is correspondingly applied to individualdroplets depending on the characteristics of the particle contained inthe droplet and then the droplet is sorted. Even when the opticaldetection unit is replaced with an electrical or magnetic detectingmechanism, controlling of the flow direction of the droplet based onelectrical or magnetic characteristics allows sorting of the droplet,thus the particles with desired characteristics can be diverted andsorted into the individual containers.

Additionally, the present technology may also be configured as below.

(1) A microchip including:

-   a flow channel configured to convey a fluid therein;-   an ejection portion including an opening directed toward an end face    of a substrate layer, the ejection portion configured to eject the    fluid flowing through the flow channel to outside, the substrate    layer being laminated to each other; and-   a cutout portion formed between the opening of the ejection portion    and the end face of the substrate layer, the cutout portion having a    larger diameter than that of the opening.    (2) The microchip according to claim 1, further including:-   a connection portion, configured to have a straight line shape, for    connecting the flow channel to the ejection portion.    (3) The microchip according to claim 2, wherein-   the substrate layer is formed by injection molding.    (4) The microchip according to claim 3, wherein-   the substrate layer is laminated by thermocompression bonding.    (5) The microchip according to claim 4, wherein-   the cutout portion has a width of 0.2 millimeters or more in    corresponding with a distance between the opening and the end face.    (6) The microchip according to claim 5, wherein-   the microchip is used in analyzing particles.    (7) A particle analyzing apparatus having the microchip as recited    in claim 6 mounted thereon.-   It should be understood that various changes and modifications to    the presently preferred embodiments described herein will be    apparent to those skilled in the art. Such changes and modifications    can be made without departing from the spirit and scope of the    present subject matter and without diminishing its intended    advantages. It is therefore intended that such changes and    modifications be covered by the appended claims.

REFERENCE SIGNS LIST

-   A Particle analyzing apparatus-   A₁ Main body-   A₂ Cover-   A₃ Sorting cover-   D droplet-   P Particle(s)-   1 Microchip-   1 a, 1 b Substrate layer-   11 Sample flow channel-   12 Orifice-   121 Cutout portion-   13 Sample fluid inlet-   14 Sheath fluid inlet-   15 Suction channel-   151 Suction outlet-   152 Communicating port-   161, 162 Tapered portion-   17 Straight portion-   2 Vibrating device-   3 Optical detection unit-   4, 41, 42 Paired Electrode-   51, 52, 53 Collection vessel (container)-   6 Ground electrode

The invention claimed is:
 1. A chip device comprising: a flow channelconfigured to pass a fluid therein; an ejection portion including anopening toward an end face of a substrate layer including at least onelayer, the ejection portion is configured to provide the fluid from theflow channel, and a cavity provided between the opening of the ejectionportion and the end face of the substrate layer, wherein at least aportion of the cavity is provided at the end face of the substratelayer, and wherein the opening has a width different from the portion ofthe cavity at the end face of the substrate layer.
 2. The chip deviceaccording to claim 1, further comprising a connection portion having alinear shape, wherein the connection portion is configured to connectthe flow channel with the ejection portion.
 3. The chip device accordingto claim 2, wherein the substrate layer is formed by injection molding.4. The chip device according to claim 3, wherein the substrate layer isformed by thermocompression bonding.
 5. The chip device according toclaim 4, wherein the cavity has a width of 0.2 millimeters or more incorresponding with a distance between the opening of the ejectionportion and the end face of the substrate layer.
 6. The chip deviceaccording to claim 5, wherein the chip device is configured to be usedin a particle analyzing apparatus.
 7. The chip device according to claim1, wherein the cavity is broader than the opening of the ejectionportion.
 8. The chip device according to claim 1, wherein the cavityincludes an octagonal shape.
 9. The chip device according to claim 1,further comprising a suction channel, wherein the suction channel isconnected with the flow channel via a communicating port.
 10. The chipdevice according to claim 1, further comprising a first tapered portion,wherein the first tapered portion is provided between the flow channeland the opening of the ejection portion.
 11. The chip device accordingto claim 1, wherein the chip device includes two substrate layers andwherein the flow channel is formed by at least two layers and the flowchannel is at one or both of the two substrate layers.
 12. The chipdevice according to claim 1, wherein the cavity has a width at leasttwice larger than the opening.
 13. A particle analyzing apparatuscomprising: a chip device configured to convey a fluid; an opticaldetector; and a plurality of electrodes, wherein the chip deviceincludes a flow channel configured to pass a fluid therein; an ejectionportion including an opening toward an end face of a substrate layerincluding at least one layer, the ejection portion is configured toprovide the fluid from the flow channel, and a cavity provided betweenthe opening of the ejection portion and the end face of the substratelayer, wherein at least a portion of the cavity is provided at the endface of the substrate layer, and wherein the opening has a widthdifferent from the portion of the cavity at the end face of thesubstrate layer.
 14. The particle analyzing apparatus according to claim13, wherein the cavity is broader than the opening of the ejectionportion.
 15. The particle analyzing apparatus according to claim 13,wherein the substrate layer is formed by injection molding.
 16. Theparticle analyzing apparatus according to claim 13, wherein thesubstrate layer is formed by thermocompression bonding.
 17. The particleanalyzing apparatus according to claim 13, wherein the optical detectorincludes a laser light source, an irradiation system and a detectionsystem.
 18. The particle analyzing apparatus according to claim 13,further comprising a vibrating device, wherein the vibrating device isconfigured to vibrate the device.
 19. The particle analyzing apparatusaccording to claim 13, wherein the cavity includes an octagonal shape.20. The particle analyzing apparatus according to claim 13, furthercomprising a ground electrode, wherein the ground electrode is providedbetween the cavity and the electrodes.
 21. The particle analyzingapparatus according to claim 13, further comprising a second taperedportion, wherein the second tapered portion is downstream of the firsttapered portion and is provided between the flow channel and the openingof the ejection portion.